May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.07.05

In Operando XPS Study of Dry Etching of Metals

When and Where

May 10, 2022
3:00pm - 3:30pm
Hawai'i Convention Center, Level 3, 314

Presenter(s)

Co-Author(s)

Robert Opila1,Zijian Wang1,Omar Melton1

University of Delaware1

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
John Conley
Mandakini Kanungo

In this Session