May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.01.08
Control of Interfacial Gain Structure for Deposition of III-V Nitrides with RF Bias Atomic Layer Annealing
When and Where
May 8, 2022
10:45am - 11:15am
10:45am - 11:15am
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Andrew Kummel1,Aaron Mcleod1,Scott Ueda1,Jeff Spiegelman2
University of California, San Diego1,Rasirc2
Keywords
atomic layer deposition
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag