May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ01.16.04
Fabrication of High-Quality Templates by Face-to-Face Annealing of Sputtered AlN for Deep UV LEDs
When and Where
May 23, 2022
10:00pm - 10:30pm
10:00pm - 10:30pm
EQ01-Virtual
Presenter(s)
Co-Author(s)
Hideto Miyake1,Kenjiro Uesugi1,Kanako Shojiki1,Shiyu Xiao1,Shigeyuki Kuboya1
Mie University1
Keywords
nitride
Symposium Organizers
Robert Kaplar, Sandia National Laboratories
Srabanti Chowdhury, Stanford University
Yoshinao Kumagai, Tokyo University of Agriculture and Technology
Julien Pernot, University of Grenoble Alpes
Session Chairs
Yoshinao Kumagai