May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.02.04

Atomic Layer Processing for Engineering Interfaces in Functionally Enhanced Complex Materials

When and Where

May 8, 2022
1:45pm - 2:15pm
Hawai'i Convention Center, Level 3, 314

Presenter(s)

Co-Author(s)

Jane Chang1

University of California, Los Angeles1

Keywords

atomic layer deposition | atomic layer etching | interface

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Jane Chang

In this Session