May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.04.01
Stress Relaxation of Hydrogenated Amorphous Carbon Films by Incorporating Carbon Nanoparticles Using Plasma Chemical Vapor Deposition
When and Where
May 10, 2022
8:30am - 8:45am
8:30am - 8:45am
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
Kazunori Koga1,2,Sunghwa Hwang1,Shinjiro Ono1,Daichi Yoshikawa1,Takamasa Okumura1,Naoto Yamashita1,Kunihiro Kamataki1,Naho Itagaki1,Masaharu Shiratani1,Jun-Seok Oh3,Susumu Takabayashi4,Tatsuyuki Nakatani5
Kyushu Univ.1,National Institutes of Natural Sciences2,Osaka City University3,National Institute of Technology, Ariake College4,Okayama University of Science5
Keywords
plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Mark Kushner
David Staack