Improved FIB-Based Fabrication of an Operative Pt/HfO₂/TiN Device for Biasing and/or Heating TEM Using an In Situ FIB Method

May 10, 2022
11:30am - 11:45am

Hawai'i Convention Center, Level 4, Ballroom C

Robert Winkler²,Yevheniy Pivak¹,Hugo Perez-Garza¹,Oscar Recalde²,Alexander Zintler²,Despina Nasiou²,Tianshu Jiang²,Leopoldo Molina-Luna²

Denssolutions¹,TU Darmstadt²

in situ | transmission electron microscopy (TEM)

Leopoldo Molina-Luna, Darmstadt University of Technology

Ursel Bangert, University of Limerick

Martial Duchamp, Nanyang Technological Universisty

Andrew Minor, University of California, Berkeley

Bronze
DENSsolutions BV
MRS-Singapore
Quantum Detectors Ltd

Martial Duchamp

B C Regan

Improved FIB-Based Fabrication of an Operative Pt/HfO2/TiN Device for Biasing and/or Heating TEM Using an In Situ FIB Method