May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ01.09.04

Optimized Annealing for Activation of Implanted Si in β-Ga2O3

When and Where

May 12, 2022
2:30pm - 2:45pm
Hawai'i Convention Center, Level 3, 318B

Presenter(s)

Co-Author(s)

Katie Gann1,Jonathan McCandless1,Michael Thompson1

Cornell University1

Keywords

annealing

Symposium Organizers

Robert Kaplar, Sandia National Laboratories
Srabanti Chowdhury, Stanford University
Yoshinao Kumagai, Tokyo University of Agriculture and Technology
Julien Pernot, University of Grenoble Alpes

Session Chairs

Robert Kaplar
Julien Pernot

In this Session