May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.06.01

Surface Functionalization Using Small Molecule Inhibitors for Area-Selective Atomic Layer Deposition

When and Where

May 10, 2022
8:30am - 9:00am
Hawai'i Convention Center, Level 3, 314

Presenter(s)

Co-Author(s)

Adrie Mackus1

Eindhoven University of Technology1

Keywords

atomic layer deposition | infrared (IR) spectroscopy | selective area deposition

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Santanu Bag
Mandakini Kanungo
Adrie Mackus

In this Session