May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.10.06
Vapor-Phase Infiltration (VPI)—An Emerging Hybrid Synthesis and Nanopatterning Method Derived from Atomic Layer Deposition (ALD) for Microelectronics Applications
When and Where
May 24, 2022
11:40am - 12:10pm
11:40am - 12:10pm
EQ06-Virtual
Presenter(s)
Co-Author(s)
Chang-Yong Nam1
Brookhaven National Laboratory1
Keywords
atomic layer deposition | self-assembly
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag
Mandakini Kanungo
Chang-Yong Nam
Gilad Zorn