May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.06.03
Developing Hafnium Oxide Thin Films on Silicon with Robust Wet Chemical Etch Resistance
When and Where
May 10, 2022
9:15am - 9:30am
9:15am - 9:30am
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Ailish Wratten1,Nicholas Grant1,David Walker1,John Murphy1
University of Warwick1
Keywords
atomic layer deposition | Si
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag
Mandakini Kanungo
Adrie Mackus