May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.12.02
Growth of Nanoparticles in TEOS rf Plasma with Amplitude Modulation
When and Where
May 23, 2022
9:30pm - 9:45pm
9:30pm - 9:45pm
MF01-Virtual
Presenter(s)
Co-Author(s)
Akihiro Yamamoto1,KoHei Abe1,Iori Nagao1,Michihiro Otaka1,Daisuke Yamashita1,Kunihiro Kamataki1,Takamasa Okumura1,Naoto Yamashita1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1
Kyushu University1,National Institutes of Natural Sciences2
Keywords
plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Takeshi Kitajima
Takayuki Watanabe