May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.01.05
The Importance of the Metal-Adjacent Atom in Hybrid Metal/Organic Vapor Deposition
When and Where
May 8, 2022
10:15am - 10:30am
10:15am - 10:30am
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Jacqueline Lewis1,Jingwei Shi1,Steven I-Cheng Hsu1,Stacey Bent1
Stanford University1
Keywords
atomic layer deposition | chemical composition | thin film
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag