May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ01.16.02
Fabrication of Highly-Oriented Wide-Bandgap Oxide Thin Films on the Surface-Modified Polymer Substrates by Room-Temperature UV Laser/Light Processes
When and Where
May 23, 2022
9:30pm - 9:45pm
9:30pm - 9:45pm
EQ01-Virtual
Presenter(s)
Co-Author(s)
Tomoaki Oga1,Ryoya Kai1,Naho Kaneko1,Kenta Kaneko1,Satoru Kaneko2,1,Hisashi Miyazaki3,Akifumi Matsuda1,Mamoru Yoshimoto1
Tokyo Institute of Technology1,Kanagawa Institute of Industrial Science and Technology2,National Defense Academy3
Keywords
laser annealing | oxide | physical vapor deposition (PVD)
Symposium Organizers
Robert Kaplar, Sandia National Laboratories
Srabanti Chowdhury, Stanford University
Yoshinao Kumagai, Tokyo University of Agriculture and Technology
Julien Pernot, University of Grenoble Alpes
Session Chairs
Yoshinao Kumagai