May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
CH01.10.03
Viewing the Effect of a Plasma In Situ in the High Resolution Transmission Electron Microscope
When and Where
May 12, 2022
8:45am - 9:00am
8:45am - 9:00am
Hawai'i Convention Center, Level 4, Kalakaua Ballroom A
Presenter(s)
Co-Author(s)
Jean-Luc Maurice1,Pavel Bulkin1,Éric Ngo2,Weixi Wang1,Ileana Florea1,Martin Foldyna1,Pere Roca i Cabarrocas1
École Polytechnique, Institut Polytechnique de Paris, CNRS1,Université Paris-Saclay, CNRS2
Keywords
chemical vapor deposition (CVD) (deposition) | plasma-enhanced CVD (PECVD) (chemical reaction) | transmission electron microscopy (TEM)
Symposium Organizers
Wenpei Gao, North Carolina State University
Arnaud Demortiere, Universite de Picardie Jules Verne
Madeline Dukes, Protochips, Inc.
Yuzi Liu, Argonne National Laboratory
Symposium Support
Silver
Protochips
Protochips
Session Chairs
Arnaud Demortiere
Madeline Dukes
Wenpei Gao
Yuzi Liu