May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.04.05
Interface Engineering of Potential Ruthenium Interconnect for Reduced Electrical Resistivity
When and Where
May 9, 2022
2:45pm - 3:00pm
2:45pm - 3:00pm
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Yu-Lin Chen1,Yi-Ying Fang1,Shou-Yi Chang1
National Tsing Hua University1
Keywords
chemical vapor deposition (CVD) (deposition) | electrical properties
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Santanu Bag
Mandakini Kanungo
Tse Nga Ng