May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.05.04
Structural Control of Hydrogenated Amorphous Carbon Films by Substrate Position and Gas Pressure in Plasma Chemical Vapor Deposition
When and Where
May 10, 2022
2:15pm - 2:30pm
2:15pm - 2:30pm
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
Shinjiro Ono1,Sunghwa Hwang1,Daichi Yoshikawa1,Takamasa Okumura1,Kunihiro Kamataki1,Naoto Yamashita1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1,Jun-Seok Oh3,Susumu Takabayashi4,Tatsuyuki Nakatani5
Kyushu Univ.1,National Institutes of Natural Sciences2,Osaka City University3,National Institute of Technology, Ariake College4,Okayama Universiry of Science5
Keywords
plasma-enhanced CVD (PECVD) (deposition) | Raman spectroscopy
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Kazunori Koga
Fumiyoshi Tochikubo