May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.06.04
Guiding Area Selective Deposition by a Mechanistic Understanding of Surface Chemistry
When and Where
May 10, 2022
10:00am - 10:30am
10:00am - 10:30am
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Stacey Bent1
Stanford University1
Keywords
atomic layer deposition | chemical reaction | in situ
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag
Mandakini Kanungo
Adrie Mackus