May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
SF10.12.03

Simultaneous Enhancement of Piezoelectric and Elastic Properties in Codoped AlN System with B and Sc

When and Where

May 24, 2022
8:00am - 8:05am
SF10-Virtual

Presenter(s)

Co-Author(s)

Huirong Jing1,Yaowei Wang1,Qiuhao Wen1,Xiaomeng Cai1,Ke Liu1,Weiming Li2,Lei Zhu3,Xin Li3,Hong Zhu1

Shanghai Jiao Tong University1,Shanghai Institute of IC Materials2,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences3

Symposium Organizers

Symposium Support

Gold
JEOL Korea Ltd.

Session Chairs

Young-Min Kim
Jaekwang Lee

In this Session