May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
QT11.09.04
Mitigation of Dielectric Losses in NbN Resonators Using Thermal ALD with Hydrazine
When and Where
May 12, 2022
8:45am - 9:00am
8:45am - 9:00am
Hawai'i Convention Center, Level 3, 304A
Presenter(s)
Co-Author(s)
Mahmut Sami Kavrik1,Shaul Aloni1,David Ogletree1,Irfan Siddiqi2,1,Adam Schwartzberg1
Lawrence Berkeley National Laboratory1,University of California, Berkeley2
Keywords
atomic layer deposition | decoherence
Symposium Organizers
Paolo Mele, Shibaura Institute of Technology
Valeria Braccini, CNR - SPIN
Kazumasa Iida, Nagoya Univ
Qiang Li, Stony Brook University/Brookhaven National Laboratory
Symposium Support
Silver
SuperOx Japan
Bronze
SuNAM Co., Ltd.
SuperOx Japan
Bronze
SuNAM Co., Ltd.
Session Chairs
Nathan Sitaraman
Sarah Willson