May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.04.05
Time Resolved Optical Emission Spectroscopy in Ar and Ar/Ne Capacitively Coupled Radio Frequency Plasma
When and Where
May 10, 2022
9:30am - 9:45am
9:30am - 9:45am
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
Michihiro Otaka1,Daiki Nagamatsu1,Toshiaki Arima1,Kunihiro Kamataki1,Daisuke Yamashita1,Naoto Ymashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,2,Masaharu Shiratani1
Kyushu University1,National Institutes of Natural Sciences2
Keywords
Ar | plasma-enhanced CVD (PECVD) (deposition) | spectroscopy
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Mark Kushner
David Staack