May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
DS01.02.05
Using ML Tools to Enable High-throughput Studies of Amorphous Material Surfaces, and Its Application to Plasma Etching
When and Where
May 8, 2022
2:30pm - 2:45pm
2:30pm - 2:45pm
Hawai'i Convention Center, Level 3, Lili'U Theater, 310
Presenter(s)
Co-Author(s)
Martin Siron1,2,Nita Chandrasekhar2,Kristin Persson1,3
University of California, Berkeley1,Intel Corporation2,Lawrence Berkeley National Laboratory3
Keywords
interface
Symposium Organizers
Mathieu Bauchy, University of California, Los Angeles
Mathew Cherukara, Argonne National Laboratory
Grace Gu, University of California, Berkeley
Badri Narayanan, University of Louisville
Session Chairs
Mathieu Bauchy