May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF03.07.07
Influence of The Surface Conductivity of Polymer Films on The Attractive Force of A Bipolar Electrostatic Chuck
When and Where
May 11, 2022
10:45am - 11:00am
10:45am - 11:00am
Hawai'i Convention Center, Level 3, 328
Presenter(s)
Co-Author(s)
Jeremy Gavriel1,Yuki Taoka1,Shigeki Saito1
Tokyo Institute of Technology1
Keywords
electrical properties | polymer
Symposium Organizers
Aaron Franklin, Duke University
Joseph Andrews, University of Wisconsin
Thomas Anthopoulos, King Abdullah University of Science and Technology
Cinzia Casiraghi, University of Manchester
Session Chairs
Aaron Franklin
Chang Kyu Jeong