May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.11.02
Development of High Frequency-High Power Impulse Magnetron Sputtering Power Supply and Its Diamond-Like Carbon Film Properties
When and Where
May 23, 2022
6:45pm - 7:00pm
6:45pm - 7:00pm
MF01-Virtual
Presenter(s)
Co-Author(s)
Hiroyuki Fukue1,Tatsuyuki Nakatani1,Tadayuki Okano2,Masahide Kuroiwa2,Shinsuke Kunitsugu3,Hiroki Oota4,Ken Yonezawa4,1
Okayama University of Science1,Tokyo Electronics Co., Ltd.2,Industrial Technology Center of Okayama Prefecture3,Kenix Corporation4
Keywords
C | Raman spectroscopy | sputtering
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Kunihiro Kamataki
Fumiyoshi Tochikubo