May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.01.07

Integrating ALD with Anion Exchange Chemistry to Tune p-type CuOxSy Semiconductors with Atomic Precision

When and Where

May 8, 2022
10:30am - 10:45am
Hawai'i Convention Center, Level 3, 314

Presenter(s)

Co-Author(s)

Julia Lenef1,Jaesung Jo1,Andrew Gayle1,Orlando Trejo1,Rebecca Peterson1,Neil Dasgupta1

University of Michigan–Ann Arbor1

Keywords

atomic layer deposition | surface reaction | thin film

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Santanu Bag

In this Session