November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ06.09.02
Atomic Layer Etching—Towards the Atomic Limit in Scalable Manufacturing
When and Where
Dec 1, 2022
2:00pm - 2:30pm
2:00pm - 2:30pm
Sheraton, 2nd Floor, Back Bay B
Presenter(s)
Co-Author(s)
Austin Minnich1
California Institute of Technology1
Keywords
2D materials
Symposium Organizers
Xu Zhang, Carnegie Mellon University
Monica Allen, University of California, San Diego
Ming-Yang Li, TSMC
Doron Naveh, Bar-Ilan Univ
Session Chairs
Shengxi Huang
Yuxuan Cosmi Lin