Using Image Based Artificial Intelligence for In Situ Growth Prediction of Single Crystalline Diamond as a Tool to Improve SCD Wafer Dimensions and Growth Yield

When and Where

Nov 29, 2022
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Presenter(s)

Matthias Muehle

Rohan Reddy

Arjun Srinivasan

Elias Garratt

Co-Author(s)

Matthias Muehle¹,Rohan Reddy¹,Arjun Srinivasan¹,Elias Garratt²

Fraunhofer USA¹,Michigan State University²

Keywords

in situ | plasma-enhanced CVD (PECVD) (deposition)

Symposium Organizers

Anke Krueger, Stuttgart University

Philippe Bergonzo, Seki Diamond Systems

Chia-Liang Cheng, National Dong Hwa University

Mariko Suzuki, University of Cádiz

Symposium Support

Silver
MUEGGE GmbH
Seki Diamond Systems

Bronze
Applied Diamond, Inc.
EDP Corporation
Fine Abrasives Taiwan CO., LTD.
Fraunhofer USA, Inc.
Qnami AG

Session Chairs

Chia-Liang Cheng

Mariko Suzuki

2022 MRS Fall Meeting