November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ06.10.11
Low-Energy Ion Implantation—Range Comparisons Between Theory and Experiment
When and Where
Dec 2, 2022
11:45am - 12:00pm
11:45am - 12:00pm
Hynes, Level 3, Room 306
Presenter(s)
Co-Author(s)
Michael Titze1,Jonathan Poplawsky2,Alex Belianinov1,Edward Bielejec1
Sandia National Laboratories1,Oak Ridge National Laboratory2
Keywords
ion-implantation | ion-solid interactions
Symposium Organizers
Xu Zhang, Carnegie Mellon University
Monica Allen, University of California, San Diego
Ming-Yang Li, TSMC
Doron Naveh, Bar-Ilan Univ
Session Chairs
Siyuan Dai
Yuxuan Cosmi Lin