November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ06.10.04
Conformal Growth of Hexagonal Boron Nitride on Silicon-Based Nano-Trenches with High-Aspect Ratio
When and Where
Dec 2, 2022
9:15am - 9:30am
9:15am - 9:30am
Hynes, Level 3, Room 306
Presenter(s)
Co-Author(s)
Jiye Kim1,Chang-Won Choi1,Seokho Moon1,Doh Kyung Yeon1,Hokyeong Jeong2,1,Jaewon Kim3,1,Jaerim Kim1,Dongwa Lee1,Si-Young Choi1,Jong kyu Kim1
Pohang University of Science and Technology1,Samsung Electronics Memory Division2,Samsung Advanced Institute of Technology3
Keywords
2D materials | metalorganic deposition
Symposium Organizers
Xu Zhang, Carnegie Mellon University
Monica Allen, University of California, San Diego
Ming-Yang Li, TSMC
Doron Naveh, Bar-Ilan Univ
Session Chairs
Siyuan Dai
Yuxuan Cosmi Lin