November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ07.14.01
Plasma CVD Engineering of Nitrogen-Vacancy Centers in (111) Single Crystal Diamond
When and Where
Dec 6, 2022
9:00pm - 9:30pm
9:00pm - 9:30pm
EQ07-virtual
Presenter(s)
Co-Author(s)
Hiromitsu Kato1
National Institute of Advanced Industrial Science and Technology1
Keywords
C | plasma-enhanced CVD (PECVD) (chemical reaction) | quantum materials
Symposium Organizers
Anke Krueger, Stuttgart University
Philippe Bergonzo, Seki Diamond Systems
Chia-Liang Cheng, National Dong Hwa University
Mariko Suzuki, University of Cádiz
Symposium Support
Silver
MUEGGE GmbH
Seki Diamond Systems
Bronze
Applied Diamond, Inc.
EDP Corporation
Fine Abrasives Taiwan CO., LTD.
Fraunhofer USA, Inc.
Qnami AG
MUEGGE GmbH
Seki Diamond Systems
Bronze
Applied Diamond, Inc.
EDP Corporation
Fine Abrasives Taiwan CO., LTD.
Fraunhofer USA, Inc.
Qnami AG
Session Chairs
Philippe Bergonzo
David Simpson