November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ09.15.02
Controlling the Polarity of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films by Using Ge Addition
When and Where
Dec 7, 2022
8:05am - 8:10am
8:05am - 8:10am
EQ09-virtual
Presenter(s)
Co-Author(s)
Sri Ayu Anggraini1,Masato Uehara1,Kenji Hirata1,Hiroshi Yamada1,Morito Akiyama1
National Institute of Advanced Industrial Science and Technology1
Keywords
nitride | Sc
Symposium Organizers
Ying-Hao Chu, National Tsing Hua University
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
Olga Ovchinnikova, Oak Ridge National Laboratory
Bhagwati Prasad, Indian Institute of Science
Symposium Support
Bronze
CRYOGENIC LIMITED
CRYOGENIC LIMITED
Session Chairs
Ying-Hao Chu
Chih-huang Lai