Spatially Resolved Electrical Analysis of Epitaxial Defect-Stabilized Hafnium Oxide Thin Films

When and Where

Nov 28, 2022
4:00pm - 4:15pm

Sheraton, 3rd Floor, Gardner A/B

Presenter(s)

Niclas Schmidt

Silvia Karthäuser

Nico Kaiser

Tobias Vogel

Eszter Piros

Lambert Alff

Regina Dittmann

Rainer Waser

Co-Author(s)

Niclas Schmidt¹,Silvia Karthäuser¹,Nico Kaiser²,Tobias Vogel²,Eszter Piros²,Lambert Alff²,Regina Dittmann¹,Rainer Waser¹

Forschungszentrum Jülich GmbH, Peter-Grünberg-Institut 7 (PGI-7)¹,Advanced Thin Film Technology Division, Institute of Materials Science, TU Darmstadt²

Keywords

defects | molecular beam epitaxy (MBE) | scanning probe microscopy (SPM)

Symposium Organizers

Yuanyuan Zhou, Hong Kong Baptist University

Carmela Aruta, National Research Council

Panchapakesan Ganesh, Oak Ridge National Laboratory

Hua Zhou, Argonne National Laboratory

Session Chairs

Hyeon Han

Hua Zhou

2022 MRS Fall Meeting