November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
CH02.07.02
Mapping Thermal Signals with STEM EBIC
When and Where
Nov 30, 2022
8:30am - 8:45am
8:30am - 8:45am
Hynes, Level 1, Room 101
Presenter(s)
Co-Author(s)
William Hubbard1,Matthew Mecklenburg2,B. C. Regan2,1
NanoElectronic Imaging, Inc.1,University of California, Los Angeles2
Keywords
in situ | metrology | scanning transmission electron microscopy (STEM)
Symposium Organizers
Robert Klie, University of Illinois at Chicago
Miaofang Chi, Oak Ridge National Laboratory
Ryo Ishikawa, The University of Tokyo
Quentin Ramasse, SuperSTEM Laboratory
Symposium Support
Bronze
Gatan
JEOL USA Inc.
Protochips Inc
Thermo Fisher Scientific
Gatan
JEOL USA Inc.
Protochips Inc
Thermo Fisher Scientific
Session Chairs
Matthieu Bugnet
Miaofang Chi