Arnab Sen Gupta¹,Kaan Oguz¹,I-cheng Tung¹,Chia-ching Lin¹,Sou-chi Chang¹,Anandi Roy¹,Jason Peck¹,Brandon Holybee¹,Rob Jordan¹,Thomas Hoff¹,Sudarat Lee¹,Scott Clendenning¹,Ian Young¹,Uygar E. Avci¹,Matthew V. Metz¹

Intel Corporation¹

Keywords

physical vapor deposition (PVD)

Symposium Organizers

Ying-Hao Chu, National Tsing Hua University

Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin

Olga Ovchinnikova, Oak Ridge National Laboratory

Bhagwati Prasad, Indian Institute of Science

Symposium Support

Bronze
CRYOGENIC LIMITED

Session Chairs

Ying-Hao Chu

Chih-huang Lai

2022 MRS Fall Meeting

High Performance Metal-Insulator-Metal SrTiO3 Thin Film Capacitors Integrated on 300 mm Si Wafers for Advanced Technology Nodes

When and Where

Presenter(s)

Co-Author(s)

Keywords

Symposium Organizers

Symposium Support

Session Chairs

In this Session

High Performance Metal-Insulator-Metal SrTiO₃ Thin Film Capacitors Integrated on 300 mm Si Wafers for Advanced Technology Nodes