Room-Temperature Fabrication of Highly-Oriented β-Ga₂O₃ Thin Film on ZnO/AlO_x-Buffered Cyclo-Olefin Polymer Substrate via Excimer Laser Annealing of Amorphous Thin Film

Nov 28, 2022
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Ryoya Kai

Tomoaki Oga

Ryoya Kai¹,Tomoaki Oga¹,Satoru Kaneko^2,1,Akifumi Matsuda¹,Mamoru Yoshimoto¹

Tokyo Institute of Technology¹,Kanagawa Institute of Industrial Science and Technology²

laser annealing | nucleation & growth | physical vapor deposition (PVD)

Stefaan De Wolf, King Abdullah University of Science and Technology

Geoffroy Hautier, University Catholique de Louvain

Monica Morales-Masis, University of Twente

Barry Rand, Princeton University

Stefaan De Wolf

Geoffroy Hautier

Monica Morales-Masis

Barry Rand

Room-Temperature Fabrication of Highly-Oriented β-Ga2O3 Thin Film on ZnO/AlOx-Buffered Cyclo-Olefin Polymer Substrate via Excimer Laser Annealing of Amorphous Thin Film