November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF03.05.03
Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
When and Where
Nov 30, 2022
9:15am - 9:30am
9:15am - 9:30am
Sheraton, 3rd Floor, Hampton
Presenter(s)
Co-Author(s)
Son Nguyen1,Thomas J Haigh1,Matthew Shoudy1,Yiping Yao1,Huai Huang1,Hosadurga Shobha1,Michael Rizzolo1,Donald Canaperi1,Jean Wynne1,Steve Bedell2,Kevin Wynne3,William Lanford3
IBM Research-Albany Nanotech1,IBM T.J. Watson Research Center2,University at Albany, State University of New York3
Keywords
thin film
Symposium Organizers
Wei-Hung Chiang, National Taiwan University of Science and Technology
Carla Berrospe-Rodríguez, University of California, Riverside
Fiorenza Fanelli, National Research Council (CNR)
Tsuyohito Ito, The University of Tokyo
Session Chairs
Fiorenza Fanelli
Davide Mariotti