Toward Wafer-Scale Growth of Sb₂Te₃ Films via Low-Temperature ALD for Self-Powered Broadband Photodetector

Nov 29, 2022
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Jun Yang

Jun Yang^1,2,Samik Mukherjee¹,Kornelius Nielsch^1,2

Leibniz Institute for Solid State and Materials Research Dresden¹,Technische Universität Dresden²

2D materials | atomic layer deposition

Nicholas Glavin, Air Force Research Laboratory

Aida Ebrahimi, The Pennsylvania State University

SungWoo Nam, University of California, Irvine

Won Il Park, Hanyang University

Bronze
MilliporeSigma

Nicholas Glavin

Won Il Park

Toward Wafer-Scale Growth of Sb2Te3 Films via Low-Temperature ALD for Self-Powered Broadband Photodetector