November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
CH01.08.12
In Situ Pyroelectric Heat Detection for Elucidating Atomic Layer Deposition Thermodynamics and Kinetics
When and Where
Dec 1, 2022
11:15am - 11:30am
11:15am - 11:30am
Hynes, Level 1, Room 102
Presenter(s)
Co-Author(s)
Alex Martinson1,Ashley Bielinski1
Argonne National Laboratory1
Keywords
atomic layer deposition
Symposium Organizers
Dongsheng Li, Pacific Northwest National Laboratory
Qian Chen, University of Illinois at Urbana-Champaign
Yu Han, King Abdullah University of Science and Technology
Barnaby Levin, Direct Electron LP
Symposium Support
Bronze
King Abdullah University of Science and Technology
MilliporeSigma
King Abdullah University of Science and Technology
MilliporeSigma
Session Chairs
Koji Harano
Barnaby Levin