April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting

Atomic Layer Deposition of Ferroelectrics Based on HfPO2—Polycrystallinity, Polar Domains and Interfaces

When and Where

Apr 17, 2021
10:00am - 11:15am
EL09

Presenter(s)

Co-Author(s)

Paul McIntyre1

Stanford University1

Keywords

atomic layer deposition

Symposium Organizers

Asif Khan, Georgia Institute of Technology
Ru Huang, Peking University
Changhwan Shin, Sungkyunkwan University
Pavlo Zubko, University College London

Session Chairs

Sven Beyer
Jorge Iniguez
Asif Khan
Paul McIntyre
Kai Ni
Pavlo Zubko

In this Session