April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
SM07.07.05
Late News: Ultrahigh- Block Copolymer Materials with Versatile Etch Selectivity for Sub-10 nm Pattern Transfer
When and Where
Apr 19, 2021
4:45pm - 5:00pm
4:45pm - 5:00pm
SM07
Presenter(s)
Co-Author(s)
Jian Sun1,Koei Azuma2,Changyeon Lee3,Youngwoo Choo4,Teruaki Hayakawa2,Chinedum Osuji3,Padma Gopalan1
University of Wisconsin-Madison1,Tokyo Institute of Technology2,University of Pennsylvania3,Yale University4
Keywords
self-assembly
Symposium Organizers
Xin Zhang, Pacific Northwest National Laboratory
Qian Chen, University of Illinois at Urbana-Champaign
Hong-Gang Liao, Xiamen University
Youhong Tang, Flinders University
Session Chairs
Lili Liu
Xin Zhang