Growth and Characterization of MOVPE-Grown Low Sheet Resistance β-(Al_xGa_1-x)₂O₃/β-Ga₂O₃ Heterostructure Channels

Apr 19, 2021
8:45pm - 9:00pm

EL04

Rujun Sun

Saurav Roy

Nasim Alem

Praneeth Ranga¹,Arkka Bhattacharyya¹,Adrian Chmielewski²,Rujun Sun¹,Saurav Roy¹,Mike Scarpulla¹,Nasim Alem²,Sriram Krishnamoorthy¹

The University of Utah¹,The Pennsylvania State University²

Hall effect | vapor phase epitaxy (VPE)

Hongping Zhao, The Ohio State University

Masataka Higashiwaki, National Institute of Information & Comm Tech

Robert Kaplar, Sandia National Laboratories

Julien Pernot, University of Grenoble

Silver
Taiyo Nippon Sanso

Nasim Alem

Masataka Higashiwaki

Hongping Zhao

Growth and Characterization of MOVPE-Grown Low Sheet Resistance β-(AlxGa1-x)2O3/β-Ga2O3 Heterostructure Channels