April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL04.02.05

Growth of High Quality MOCVD Aluminum Nitride Using N2 as Carrier Gas

When and Where

Apr 18, 2021
2:00pm - 2:15pm
EL04

Presenter(s)

Co-Author(s)

Samiul Hasan1,Abdullah Mamun1,Kamal Hussain1,Dhruvinkumar Patel1,Mikhail Gaevski1,Iftikhar Ahmad1,Asif Khan1

University of South Carolina1

Keywords

metalorganic deposition

Symposium Organizers

Hongping Zhao, The Ohio State University
Masataka Higashiwaki, National Institute of Information & Comm Tech
Robert Kaplar, Sandia National Laboratories
Julien Pernot, University of Grenoble

Symposium Support

Silver
Taiyo Nippon Sanso

Session Chairs

Bruno Daudin
Robert Kaplar

In this Session