April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL04.05.06
Low-Defect Etched-and-Regrown PN Diodes by In Situ Tertiarybutylchloride (TBCl) Etching
When and Where
Apr 19, 2021
9:25am - 9:40am
9:25am - 9:40am
EL04
Presenter(s)
Co-Author(s)
Bingjun Li1,Sizhen Wang1,Jung Han1
Yale University1
Keywords
chemical vapor deposition (CVD) (deposition) | crystal growth | reactive ion etching
Symposium Organizers
Hongping Zhao, The Ohio State University
Masataka Higashiwaki, National Institute of Information & Comm Tech
Robert Kaplar, Sandia National Laboratories
Julien Pernot, University of Grenoble
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Robert Kaplar
Hongping Zhao