April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
ST01.10.02
Full Characterization of an Individual 5nm Film Within a Bilayer—Stiffness Degradation Due to Surfaces and Dopants in Low-k Dielectrics
When and Where
Apr 19, 2021
4:25pm - 4:40pm
4:25pm - 4:40pm
ST01
Presenter(s)
Co-Author(s)
Travis Frazer1,Joshua Knobloch1,Jorge Nicolas Hernandez Charpak1,Kathleen Hoogeboom-Pot1,Damiano Nardi1,Sadegh Yazdi1,Weilun Chao2,Erik Anderson2,Marie Tripp3,Sean King3,Henry Kapteyn1,Margaret Murnane1,Begoña Abad Mayor1
University of Colorado Boulder1,Lawrence Berkeley National Laboratory2,Intel Corporation3
Keywords
elastic properties | thin film
Symposium Organizers
Gi-Dong Sim, Korea Advanced Institute of Science and Technology
Wendy Gu, Stanford University
Matt Pharr, Texas A&M University
Jagannathan Rajagopalan, Arizona State University
Session Chairs
Wendy Gu
Matt Pharr