April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
CT02.05.02

Time Resolved Reflectometry With Pulsed Laser Melting of Implant Amorphized Si1-xGex Thin Films

When and Where

Apr 18, 2021
9:25pm - 9:40pm
CT02

Presenter(s)

Co-Author(s)

Jesse A. Johnson1,Chris Hatem2,Bruce Adams2,Xuebin Li2,David Brown3,1,Kevin Jones1

University of Florida1,Applied Materials, Inc.2,Air Force Research Laboratory3

Keywords

in situ | liquid-phase epitaxy (LPE) | thin film

Symposium Organizers

Dongsheng Li, Pacific Northwest National Laboratory
Madeline Dukes, Protochips, Inc.
Robert Sinclair, Stanford University
Daliang Zhang, Chongqing University

Session Chairs

Madeline Dukes
Biao Jin

In this Session