April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL04.05.03
Laser-Assisted MOCVD GaN Epitaxy for Vertical Power Device Applications
When and Where
Apr 19, 2021
8:40am - 8:55am
8:40am - 8:55am
EL04
Presenter(s)
Co-Author(s)
Yuxuan Zhang1,Zhaoying Chen1,Zixuan Feng1,Hongping Zhao1
The Ohio State University1
Keywords
chemical vapor deposition (CVD) (deposition) | laser-induced reaction | nitride
Symposium Organizers
Hongping Zhao, The Ohio State University
Masataka Higashiwaki, National Institute of Information & Comm Tech
Robert Kaplar, Sandia National Laboratories
Julien Pernot, University of Grenoble
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Robert Kaplar
Hongping Zhao