April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
CT03.02.06
Non-Destructive Characterization of 3D Nanostructures via EUV Coherent Diffractive Imaging Reflectometry—High-Resolution, Chemically Specific, Interface-Sensitive Maps
When and Where
Apr 19, 2021
12:15pm - 12:20pm
12:15pm - 12:20pm
CT03
Presenter(s)
Co-Author(s)
Michael Tanksalvala1,Christina Porter1,Yuka Esashi1,Nicholas Jenkins1,Zhe Zhang1,Naoto Horiguchi2,Sadegh Yazdi1,Jihan Zhou3,Michael Gerrity1,Jianwei (John) Miao3,David Ren4,Laura Waller4,Henry Kapteyn1,5,Margaret Murnane1
University of Colorado Boulder1,imec2,University of California, Los Angeles3,University of California, Berkeley4,KMLabs Inc.5
Keywords
x-ray diffraction (XRD) | x-ray tomography
Symposium Organizers
Olivier Thomas, Aix Marseille Universite
Arief Budiman, BINUS University
Margaret Murnane, University of Colorado Boulder
Ehrenfried Zschech, Fraunhofer IKTS
Session Chairs
Arief Budiman
Margaret Murnane
Olivier Thomas