April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL09.07.11
PVD TiN Development to Improve Ferroelectric Properties of HZO Films in MFM Capacitors
When and Where
Apr 19, 2021
1:40pm - 1:45pm
1:40pm - 1:45pm
EL09
Presenter(s)
Co-Author(s)
David Lehninger1,Konstantin Merstens1,Lukas Gerlich1,Maximilian Lederer1,Tarek Ali1,Konrad Seidel1
Fraunhofer Institute for Photonic Microsystems (IPMS)1
Keywords
physical vapor deposition (PVD) | x-ray diffraction (XRD)
Symposium Organizers
Asif Khan, Georgia Institute of Technology
Ru Huang, Peking University
Changhwan Shin, Sungkyunkwan University
Pavlo Zubko, University College London
Session Chairs
Michael Hoffmann
Asif Khan