April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL08.02.07

Design of Mechanically Reliable and Fracture Resistant Low-K Dielectric Hybrid Glasses for Next Generation Interconnects

When and Where

Apr 23, 2021
6:45pm - 7:00pm
EL08

Presenter(s)

Co-Author(s)

Karsu Kilic1,Reinhold Dauskardt1

Stanford University1

Keywords

elastic properties | fracture

Symposium Organizers

Silvia Armini, IMEC
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, University of Yamanashi
Andrew Simon, IBM T.J. Watson Research Center

Symposium Support

Bronze
MilliporeSigma

Session Chairs

Vincent Jousseaume
Andrew Simon

In this Session