April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL08.03.04
Amorphous Si-Rich W Silicide as a New Barrier and Contact Material for Advanced CMOS
When and Where
Apr 23, 2021
9:10pm - 9:35pm
9:10pm - 9:35pm
EL08
Presenter(s)
Co-Author(s)
Naoya Okada1,Noriyuki Uchida1,Shinichi Ogawa1,Toshihiko Kanayama1
National Institute of Advanced Industrial Science and Technology1
Keywords
chemical vapor deposition (CVD) (chemical reaction)
Symposium Organizers
Silvia Armini, IMEC
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, University of Yamanashi
Andrew Simon, IBM T.J. Watson Research Center
Symposium Support
Bronze
MilliporeSigma
MilliporeSigma
Session Chairs
Eiichi Kondoh
Andrew Simon