April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL09.11.05

Ferroelectric HZO Capacitor with W/TiN Bottom Electrode with No Wakeup

When and Where

Apr 20, 2021
12:55pm - 1:10pm
EL09

Presenter(s)

Co-Author(s)

Harshil Kashyap1,Mahmut Kavrik1,Chenghsuan Kuoo1,Ajay Yadav2,Andrew Kummel1

University of California, San Diego1,Applied Materials, Inc.2

Keywords

oxide

Symposium Organizers

Asif Khan, Georgia Institute of Technology
Ru Huang, Peking University
Changhwan Shin, Sungkyunkwan University
Pavlo Zubko, University College London

Session Chairs

Patrycja Paruch
Pavlo Zubko

In this Session